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 分子泵(Turbo Molecular Pump)主要用于為制造太陽能電池和半導(dǎo)體提供不可或缺的真空環(huán)境。島津分子泵有著世界高水準(zhǔn)的排氣能力，并且有一系列的產(chǎn)品可以滿足不同的太陽能電池模組和硅晶片的工藝需求，隨著市場的擴大，我們開發(fā)的腳步也從未停止。

? 超大的排氣流量
? 優(yōu)異的耐腐蝕性能
? 外形緊湊的控制器
? 應(yīng)對生成物對策（選購件）
? 各種監(jiān)測功能
? 網(wǎng)絡(luò)接入對應(yīng)
? 泵轉(zhuǎn)速可調(diào)
? 消費電力削減
? 適用于各種規(guī)格
? 無需調(diào)整（泵電纜更換時，無需對控制器再次調(diào)整）
? 無需蓄電池

Maximum pumping flowrate

High pumping throughput is achieved with a compact body.

Excellent corrosion resistance

Resistant to corrosive gas because dispersed plating is used on the rotor (TMP-4203LMC, TMP-3403LMC). Dispersed plating with an excellent heat release characteristic prevents overheat of the rotor caused by high pumping throughput.
The surface of the rotor of the TMP-2203LMC and TMP-1303LMC is nickel-plated to protect against corrosive gas.

Compact power supply unit

49 % smaller and 50 % lighter as compared to Shimadzu's previous models

Measures against reaction products (optional)

Adding a function for controlling the heater and cooling water to the pump allows it to be kept at a high temperature and prevents the accumulation of reaction products inside it. The temperature controller is built into the compact power supply unit.

Various monitoring functions

LCD on the front panel displays the current, pumping speed, unbalance amount, errors, and other information. Equipped with a maintenance call timer.
Equipped with a RS-232C port on the front panel so that operation information can be loaded on a computer while the pump is operating. You can find abnormalities (increase of back pressure due to an adhered reaction product, etc.) in early stages if you compare the condition with the normal condition. This helps to protect the system from problems and keep it in good condition.

Network connection enabled

Equipped with RS-232C and RS-485 compliant serial communication ports, which enables operations to start/stop pumps, monitor operation status, and load operation history. Up to 32 pumps can be monitored using a single computer.
Using optional monitor software, multiple pumps can be monitored simultaneously.

Variable pump speed

The pump speed can be set within a range from 25 to 100 % to adjust the pump's throughput. Speed setting can be applied to the adjustment of chamber pressure. Conductance valves can be reduced when used under given conditions.

Reduced power consumption ? Compliant with major standards

• CE marking, TüV

• NRTL (UL61010A-1)

• SEMI S2

• SEMI F47

• SEMI E74

Tuning-free

Readjustment of the power supply unit is unnecessary during pump cable replacement.

Battery-less

In the case of a power failure, magnetic levitation is maintained using regenerated power, thus reducing wear of the touchdown bearing.