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MIL 8000 晶圓檢測系統

它除了可以用于宏觀和微觀檢測外，也可以作為一晶圓底部檢測的工具。除此外，它還是一顯微鏡晶圓檢測系統的進樣部件。它擁有目前***的樣品處理系統功能，包括激光配對，樣品接收選擇和SPC軟件；

大大減少了操作時間和提高處理較薄晶圓樣品的效率。

此系統，擁有了微觀和宏觀晶圓的檢測功能，也可以對晶圓底進行全景的檢測。

Proteus Inspection is a compact， table top machine for wafer inspection

It is designed to be a macro and back inspection tool， and to act as a microscope loader for a complete wafer inspection.

The tool is equipped with the most updated handling systems ad features laser mapping， recipe selection and optional SPC software.

This equipment have been designed to fulfill the needs of short cycle times as well as the increasing difficulties due to thin wafers handling.

Such needs required a careful design， based on the state of the art technological solutions for both mechanics and control system.

Proteus Loader， in its fully equipped version， features micro and macro inspection capabilities， including a backside inspection with the full view of wafer bottom.