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產品特點/Product Characteristics：

? 石墨烯薄膜產業化設備

Graphene film industrialization equipment

? 寬幅卷對卷連續生長

Wide roll-to-roll continuous growth

? APC系統:真空蝶閥自動控制

APC System: Automatic Control of Vacuum Butterfly Valve

? 碳源等工藝氣體MFC控制

MFC control of process gas such as carbon source

? 薄膜制備過程全自動控制

Automatic control of film preparation process

? 三腔室結構

Three-chamber structure

技術指標/Technical Indicators：

? 工作溫度:800-1050°C

Operating temperature: 800-1050°c

? 工藝管材質:石英管

Material of process tube: quartz tube

? 銅箔寬度:500mm

lnner diameter of process pipe: medium 550mm

? 極限真空度:小于3Pa，可恒壓控制

Limit vacuum degree: less than 3Pa, which can be controlled by constant pressure

? 恒溫區:1000mm、五段控溫

Constant temperature zone: 1000mm, five-stage temperature control

? 工藝管內徑:550mm

lnner diameter of process pipe: medium 550mm

? 銅箔運行速度約:100-400mm/min，可調

The running speed of copper foil is about 100-400mm/min, which can be adjusted